Model: WEc0122S
Appliedforcleaningprocessofpoly-siliconcellline.(loader & unloader unit optional)
Advantages:
1、Reduce the consumption of chemical
2、Capable of different sized wafers
3、Expandable module process line
4、Detection throughout whole process
5、Optimize process and reduce labor intensity
6、Low breakagerate
7、Automatic dosing Keep process stable