Cassette loading and unloading machine

Wed, 16 Sep 2020View: 1303

Characteristic:
1. Compact structure, convenient for batch processing of silicon wafers, greatly improving the efficiency
2. Realize automatic operation of various process equipment (loading and unloading)
3. It can store silicon wafers of different specifications in a short time

Advantages:
The whole machine is composed of upper (lower) material section and temporary storage section, which is used to send silicon wafer to the next process, such as PSG line. It is suitable for 125 × 125mm and 156 × 156mm silicon wafers.
5 parallel channels, automatic card box exchange. The temporary storage section can store 750 pieces (5 channels × 3 card box × 50 pieces / card box) at one time.

Specifications:
1. Silicon wafer size: 125 × 125mm, 156 × 156mm
2. Working height: 1100mm ± 50mm
3. Thickness: 150 μm
4. Transmission speed: 0.5-16m/min

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